The RF-CV method for characterization of leaky gate dielectrics
نویسندگان
چکیده
منابع مشابه
Electrical Characterization of Defects in Gate Dielectrics
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ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2004
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.01.028